JPH0519938B2 - - Google Patents

Info

Publication number
JPH0519938B2
JPH0519938B2 JP60298673A JP29867385A JPH0519938B2 JP H0519938 B2 JPH0519938 B2 JP H0519938B2 JP 60298673 A JP60298673 A JP 60298673A JP 29867385 A JP29867385 A JP 29867385A JP H0519938 B2 JPH0519938 B2 JP H0519938B2
Authority
JP
Japan
Prior art keywords
image
inspected
defect
average brightness
mask image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60298673A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62156547A (ja
Inventor
Kazuhiro Yamamoto
Arata Nemoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Sumitomo Special Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Special Metals Co Ltd filed Critical Sumitomo Special Metals Co Ltd
Priority to JP29867385A priority Critical patent/JPS62156547A/ja
Publication of JPS62156547A publication Critical patent/JPS62156547A/ja
Publication of JPH0519938B2 publication Critical patent/JPH0519938B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP29867385A 1985-12-27 1985-12-27 表面欠陥検出方法 Granted JPS62156547A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29867385A JPS62156547A (ja) 1985-12-27 1985-12-27 表面欠陥検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29867385A JPS62156547A (ja) 1985-12-27 1985-12-27 表面欠陥検出方法

Publications (2)

Publication Number Publication Date
JPS62156547A JPS62156547A (ja) 1987-07-11
JPH0519938B2 true JPH0519938B2 (en]) 1993-03-18

Family

ID=17862785

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29867385A Granted JPS62156547A (ja) 1985-12-27 1985-12-27 表面欠陥検出方法

Country Status (1)

Country Link
JP (1) JPS62156547A (en])

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2737484B2 (ja) * 1991-10-15 1998-04-08 松下電器産業株式会社 配線パターン検査装置
JP2819916B2 (ja) * 1991-02-26 1998-11-05 松下電器産業株式会社 配線パターン検査装置
JP2760250B2 (ja) * 1993-02-03 1998-05-28 株式会社デンソー ピンホール検査装置
JP5702990B2 (ja) * 2010-11-16 2015-04-15 東洋鋼鈑株式会社 板材検査方法及び板材検査装置
JP5601984B2 (ja) * 2010-11-16 2014-10-08 東洋鋼鈑株式会社 多孔板表面検査方法及び多孔板表面検査装置
JP6526514B2 (ja) * 2015-07-31 2019-06-05 リコーエレメックス株式会社 検査装置、方法及びプログラム

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4861030A (en]) * 1971-12-03 1973-08-27
US3916439A (en) * 1974-03-08 1975-10-28 Westinghouse Electric Corp Inspection system employing differential imaging

Also Published As

Publication number Publication date
JPS62156547A (ja) 1987-07-11

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